Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6913302 | Robot arm edge gripping device for handling substrates | Chuckson Yokota, Joseph Mann, Jean-Pascal Rouland, Ted Hwang | 2005-07-05 |
| 6623235 | Robot arm edge gripping device for handling substrates using two four-bar linkages | Chuckson Yokota, Joseph Mann, Jean-Pascal Rouland, Ted Hwang | 2003-09-23 |
| 6368189 | Apparatus and method for chemical-mechanical polishing (CMP) head having direct pneumatic wafer polishing pressure | Gerard S. Maloney, Jason Price, Scott Chin, Jiro Kajiwara | 2002-04-09 |
| 5851140 | Semiconductor wafer polishing apparatus with a flexible carrier plate | Chris Barns, Kenneth D. Lefton, Fred E. Mitchel | 1998-12-22 |