| 7962242 |
Automated spatial flipping apparatus and system for photomasks and photomasks with pellicles |
Thaddeus J. Wilson, Jeff Roberts |
2011-06-14 |
| 7717661 |
Compact multiple diameters wafer handling system with on-chuck wafer calibration and integrated cassette-chuck transfer |
Thaddeus J. Wilson |
2010-05-18 |
| 7679736 |
System and method for optical photomask inspection through pellicle |
Thaddeus J. Wilson, Jeff Roberts |
2010-03-16 |
| 7616301 |
Disc clamping device for multiple standard discs |
Daniel Tran |
2009-11-10 |
| 7397554 |
Apparatus and method for examining a disk-shaped sample on an X-Y-theta stage |
Guoguang Li |
2008-07-08 |
| 7349103 |
System and method for high intensity small spot optical metrology |
Mehdi Balooch, Homan Amin, Abdul Rahim Forouhi, Phillip Walsh, Guoguang Li |
2008-03-25 |
| 7330256 |
Spectrophotometric system with reduced angle of incidence |
Abdul Rahim Forouhi |
2008-02-12 |
| 7327457 |
Apparatus and method for optical characterization of a sample over a broadband of wavelengths while minimizing polarization changes |
Ray Hebert, Abdul Rahim Forouhi |
2008-02-05 |
| 7248364 |
Apparatus and method for optical characterization of a sample over a broadband of wavelengths with a small spot size |
Ray Hebert, Abdul Rahim Forouhi |
2007-07-24 |