Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7962242 | Automated spatial flipping apparatus and system for photomasks and photomasks with pellicles | Marc Aho, Jeff Roberts | 2011-06-14 |
| 7717661 | Compact multiple diameters wafer handling system with on-chuck wafer calibration and integrated cassette-chuck transfer | Marc Aho | 2010-05-18 |
| 7679736 | System and method for optical photomask inspection through pellicle | Marc Aho, Jeff Roberts | 2010-03-16 |