Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8339605 | Multilayer alignment and overlay target and measurement method | Christopher P. Ausschnitt, Jaime D. Morillo, Nigel P. Smith | 2012-12-25 |
| 8107079 | Multi layer alignment and overlay target and measurement method | Christopher P. Ausschnitt, Jaime D. Morillo, Nigel P. Smith | 2012-01-31 |
| 7876439 | Multi layer alignment and overlay target and measurement method | Christopher P. Ausschnitt, Jaime D. Morillo, Nigel P. Smith | 2011-01-25 |
| 7473502 | Imaging tool calibration artifact and method | Chistopher P. Ausschnitt, Jennifer L. Morningstar, Nigel P. Smith | 2009-01-06 |
| 7474401 | Multi-layer alignment and overlay target and measurement method | Christopher P. Ausschnitt, Jaime D. Morillo, Nigel P. Smith | 2009-01-06 |