Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5882417 | Apparatus for preventing deposition on frontside peripheral region and edge of wafer in chemical vapor deposition apparatus | Everhardus P. van de Ven, Eliot K. Broadbent, Jeffrey C. Benzing, Barry Chin, Christopher W. Burkhart +1 more | 1999-03-16 |
| 5843233 | Exclusion guard and gas-based substrate protection for chemical vapor deposition apparatus | Everhardus P. van de Ven, Eliot K. Broadbent, Jeffrey C. Benzing, Barry Chin, Christopher W. Burkhart +1 more | 1998-12-01 |
| 5769951 | Exclusion guard and gas-based substrate protection for chemical vapor deposition apparatus | Everhardus P. van de Ven, Eliot K. Broadbent, Jeffrey C. Benzing, Barry Chin, Christopher W. Burkhart | 1998-06-23 |