Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5822389 | Alignment apparatus and SOR X-ray exposure apparatus having same | Shunichi Uzawa, Takao Kariya, Makoto Higomura, Nobutoshi Mizusawa, Ryuichi Ebinuma +5 more | 1998-10-13 |
| 5524131 | Alignment apparatus and SOR x-ray exposure apparatus having same | Shunichi Uzawa, Takao Kariya, Makoto Higomura, Nobutoshi Mizusawa, Ryuichi Ebinuma +5 more | 1996-06-04 |