Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10020233 | Plasma processing apparatus and plasma processing method | Shigeru Nakamoto, Tatehito Usui, Satomi Inoue, Kousuke Fukuchi | 2018-07-10 |
| 9190336 | Plasma processing apparatus and plasma processing method | Kousuke Fukuchi, Shigeru Nakamoto, Tatehito Usui, Satomi Inoue | 2015-11-17 |
| 8500912 | Plasma processing method and plasma processing apparatus | — | 2013-08-06 |
| 8236701 | Plasma processing apparatus and plasma processing method | Masahiro Sumiya, Motohiro Tanaka | 2012-08-07 |
| 8114244 | Method for etching a sample | Yasuhiro Nishimori, Hiroshige Uchida | 2012-02-14 |