| 7864006 |
MEMS plate switch and method of manufacture |
John S. Foster, Paulo Silveira da Motta, Alok Paranjpye |
2011-01-04 |
| 7785913 |
System and method for forming moveable features on a composite substrate |
John S. Foster, Paul J. Rubel, Paulo Silveira da Motta |
2010-08-31 |
| 7675162 |
Interconnect structure using through wafer vias and method of fabrication |
John S. Foster, Steven Hovey, Paul J. Rubel |
2010-03-09 |
| 7528691 |
Dual substrate electrostatic MEMS switch with hermetic seal and method of manufacture |
Andrew Wallis, John S. Foster, Paul J. Rubel, Michael Shillinger, Jeffrey F. Summers |
2009-05-05 |
| 7233048 |
MEMS device trench plating process and apparatus for through hole vias |
— |
2007-06-19 |
| 6801681 |
Optical switch with low-inertia micromirror |
Patrick Edward Feierabend, John S. Foster, Bryant P. Hichwa, Richard Martin, Paul J. Rubel +2 more |
2004-10-05 |