Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7528691 | Dual substrate electrostatic MEMS switch with hermetic seal and method of manufacture | John S. Foster, Paul J. Rubel, Kimon Rybnicek, Michael Shillinger, Jeffrey F. Summers | 2009-05-05 |
| 7141080 | Method and apparatus for assembling an array of micro-devices | Patrick Edward Feierabend, John S. Foster, Richard Martin, Paul J. Rubel, John W. Stocker +1 more | 2006-11-28 |
| 7057245 | Method and apparatus for assembling an array of micro-devices | Patrick Edward Feierabend, Richard Martin, Jeffery F. Summers, Paul J. Rubel, John S. Foster +1 more | 2006-06-06 |
| 6812061 | Method and apparatus for assembling an array of micro-devices | Patrick Edward Feierabend, Richard Martin, Jeffery F. Summers, Paul J. Rubel, John S. Foster +1 more | 2004-11-02 |