Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7713786 | Etching/bonding chamber for encapsulated devices and method of use | John S. Foster | 2010-05-11 |
| 7528691 | Dual substrate electrostatic MEMS switch with hermetic seal and method of manufacture | Andrew Wallis, John S. Foster, Paul J. Rubel, Kimon Rybnicek, Michael Shillinger | 2009-05-05 |