Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7528691 | Dual substrate electrostatic MEMS switch with hermetic seal and method of manufacture | Andrew Wallis, John S. Foster, Paul J. Rubel, Kimon Rybnicek, Jeffrey F. Summers | 2009-05-05 |
| 6593749 | Wafer level method for probing micromechanical devices | John S. Foster, Patrick Edward Feierabend | 2003-07-15 |