MS

Michael Shillinger

IT Innovative Micro Technology: 2 patents #20 of 38Top 55%
Overall (All Time): #2,134,708 of 4,157,543Top 55%
2
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
7528691 Dual substrate electrostatic MEMS switch with hermetic seal and method of manufacture Andrew Wallis, John S. Foster, Paul J. Rubel, Kimon Rybnicek, Jeffrey F. Summers 2009-05-05
6593749 Wafer level method for probing micromechanical devices John S. Foster, Patrick Edward Feierabend 2003-07-15