Issued Patents All Time
Showing 25 most recent of 71 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12079551 | Simulation method, simulation apparatus, storage medium, film forming method, and method of producing cured product | Tosiya Asano, Yuichiro Oguchi | 2024-09-03 |
| 11651118 | Simulation method, simulation apparatus, and storage medium | Tosiya Asano, Yuichiro Oguchi | 2023-05-16 |
| 10990005 | Method in which alignment control of a member and a substrate is effected with respect to an in-plane direction of the substrate and an uncured material in a state of bringing a member and the uncured material on a substrate into contact | Shingo Okushima, Nobuhito Suehira, Kazuyuki Kasumi | 2021-04-27 |
| 10777443 | Imprint apparatus, imprinting method, and method for manufacturing article | Eiji Sakamoto | 2020-09-15 |
| 10670961 | Imprinting apparatus for producing a member in which a mold contacts a pattern forming layer using alignment control in an in-plane direction of a substrate | Shingo Okushima, Nobuhito Suehira, Kazuyuki Kasumi | 2020-06-02 |
| 10620532 | Imprint method, imprint apparatus, mold, and article manufacturing method | Motoki Okinaka | 2020-04-14 |
| 10596870 | Vehicular arm component manufacturing method and vehicular arm component | Hiroshi Kimura, Masaharu Matsumoto, Tomo TSUCHIDA | 2020-03-24 |
| 10569450 | Imprint apparatus, mold, imprint method, and method of manufacturing article | — | 2020-02-25 |
| 9579843 | Imprint apparatus in which alignment control of a mold and a substrate is effected | Shingo Okushima, Nobuhito Suehira, Kazuyuki Kasumi | 2017-02-28 |
| 9573319 | Imprinting method and process for producing a member in which a mold contacts a pattern forming layer | Shingo Okushima, Nobuhito Suehira, Kazuyuki Kasumi | 2017-02-21 |
| 9507256 | Imprint method, imprint apparatus, and process for producing chip | Nobuhito Suehira | 2016-11-29 |
| 9046793 | Light transmissive mold and apparatus for imprinting a pattern onto a material applied on a semiconductor workpiece and related methods | Nobuhito Suehira, Masao Majima, Atsunori Terasaki, Hideki Ina | 2015-06-02 |
| 9039402 | Imprinting apparatus and method therefor | Eigo Kawakami, Shingo Okushima, Hideki Ina, Atsunori Terasaki, Motoki Okinaka | 2015-05-26 |
| 8999218 | Process for producing member having pattern, pattern transfer apparatus, and mold | Masao Majima, Nobuhito Suehira | 2015-04-07 |
| 8845318 | Imprint apparatus, imprint method, and mold for imprint | Nobuhito Suehira, Hideki Ina | 2014-09-30 |
| 8845317 | Alignment method, imprint method, alignment apparatus, and position measurement method | Nobuhito Suehira, Hideki Ina, Koichi Sentoku | 2014-09-30 |
| 8828307 | Imprint method, chip production process, and imprint apparatus | Shingo Okushima, Atsunori Terasaki | 2014-09-09 |
| 8770958 | Pattern forming method and pattern forming apparatus in which a substrate and a mold are aligned in an in-plane direction | Nobuhito Suehira, Masao Majima, Atsunori Terasaki, Hideki Ina | 2014-07-08 |
| 8685306 | Molding apparatus and molding method | — | 2014-04-01 |
| 8668484 | Mold, imprint method, and process for producing a chip | Atsunori Terasaki, Nobuhito Suehira, Hideki Ina, Shingo Okushima | 2014-03-11 |
| 8568639 | Process for producing a device using a mold | Atsunori Terasaki, Nobuhito Suehira, Hideki Ina | 2013-10-29 |
| 8562846 | Process for producing a chip using a mold | Atsunori Terasaki, Nobuhito Suehira, Hideki Ina, Shingo Okushima | 2013-10-22 |
| 8404169 | Imprint apparatus and method of manufacturing article | Eigo Kawakami, Hideki Ina, Atsunori Terasaki, Shingo Okushima, Motoki Okinaka | 2013-03-26 |
| 8361336 | Imprint method for imprinting a pattern of a mold onto a resin material of a substrate and related substrate processing method | Shingo Okushima, Haruhito Ono, Nao Nakatsuji, Atsunori Terasaki | 2013-01-29 |
| 8308471 | Mold, mold production process, processing apparatus, and processing method | Atsunori Terasaki | 2012-11-13 |