| 11615973 |
Substrate carrier using a proportional thermal fluid delivery system |
Phillip Criminale, Dan Marohl, Sergio Fukuda Shoji, Brad L. Mays |
2023-03-28 |
| 10854427 |
Radio frequency (RF) pulsing impedance tuning with multiplier mode |
Katsumasa Kawasaki, Kartik Ramaswamy, Sergio Fukuda Shoji, Daisuke Shimizu |
2020-12-01 |
| 10490429 |
Substrate carrier using a proportional thermal fluid delivery system |
Phillip Criminale, Dan Marohl, Sergio Fukuda Shoji, Brad L. Mays |
2019-11-26 |
| 10468233 |
RF power delivery regulation for processing substrates |
Katsumasa Kawasaki, Sergio Fukuda Shoji |
2019-11-05 |
| 9872373 |
Smart multi-level RF pulsing methods |
Daisuke Shimizu, Wonseok Lee, Katsumasa Kawasaki, Li Ling, Kevin Choi |
2018-01-16 |
| 9788405 |
RF power delivery with approximated saw tooth wave pulsing |
Katsumasa Kawasaki, Sergio Fukuda Shoji, Daisuke Shimizu |
2017-10-10 |
| 9741539 |
RF power delivery regulation for processing substrates |
Katsumasa Kawasaki, Sergio Fukuda Shoji |
2017-08-22 |
