Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9023723 | Method of fabricating a gate-all-around word line for a vertical channel DRAM | Chorng-Ping Chang, Er-Xuan Ping | 2015-05-05 |
| 6913511 | Method and apparatus for detecting an end-point in chemical mechanical polishing of metal layers | Andreas Norbert Wiswesser, Boguslaw A. Swedek | 2005-07-05 |
| 6659842 | Method and apparatus for optical monitoring in chemical mechanical polishing | Andreas Norbert Wiswesser, Buguslaw Swedek, Manoocher Birang | 2003-12-09 |
| 6652355 | Method and apparatus for detecting an end-point in chemical mechanical polishing of metal layers | Andreas Norbert Wiswesser, Boguslaw A. Swedek | 2003-11-25 |
| 6296548 | Method and apparatus for optical monitoring in chemical mechanical polishing | Andreas Norbert Wiswesser, Boguslaw A. Swedek, Manoocher Birang | 2001-10-02 |
| 6280289 | Method and apparatus for detecting an end-point in chemical mechanical polishing of metal layers | Andreas Norbert Wiswesser, Boguslaw A. Swedek | 2001-08-28 |