| 9804087 |
Hemispherical scanning optical scatterometer |
Eric Hegstrom |
2017-10-31 |
| 9030657 |
Device and method for subaperture stray light detection and diagnosis |
William P. Kuhn, Robert S. LeCompte |
2015-05-12 |
| 7007386 |
Light duty bearing assembly |
— |
2006-03-07 |
| 6833028 |
Particle deposition system with enhanced speed and diameter accuracy |
Craig A. Scheer |
2004-12-21 |
| 6760100 |
Method and apparatus for classifying defects occurring at or near a surface of a smooth substrate |
Vladimir Ivakhnenko |
2004-07-06 |
| 6509965 |
Wafer inspection system for distinguishing pits and particles |
Michael E. Fossey, Lee D. Clementi |
2003-01-21 |
| 6486946 |
Method for discriminating between holes in and particles on a film covering a substrate |
Yuri A. Eremin |
2002-11-26 |
| 6292259 |
Wafer inspection system for distinguishing pits and particles |
Michael E. Fossey |
2001-09-18 |
| 6169601 |
Method and apparatus for distinguishing particles from subsurface defects on a substrate using polarized light |
Yuri A. Eremin, Craig A. Scheer |
2001-01-02 |
| 6122047 |
Methods and apparatus for identifying the material of a particle occurring on the surface of a substrate |
Songping Gao, Michael E. Fossey, Lee D. Clementi |
2000-09-19 |
| 6118525 |
Wafer inspection system for distinguishing pits and particles |
Michael E. Fossey, Lee D. Clementi |
2000-09-12 |
| 6091493 |
Process for particle size measurement |
Craig A. Scheer |
2000-07-18 |
| 5955654 |
Calibration standard for microroughness measuring instruments |
Bradley W. Scheer |
1999-09-21 |
| 5416590 |
Apparatus and process for measuring gap and mismatch |
Donald R. Bjork, Donald A. Rudberg, Mark E. Southwood, Brett D. Swimley |
1995-05-16 |
| 5406082 |
Surface inspection and characterization system and process |
Lee H. Pearson, Mary Knighton, Brett D. Swimley |
1995-04-11 |
| 5196906 |
Modular scatterometer with interchangeable scanning heads |
James A. Bender, Marvin L. Bernt, Donald R. Bjork, Paul D. Chausse, Daniel R. Cheever +3 more |
1993-03-23 |
| 4468556 |
Electric heating elements |
Donald M. Cunningham |
1984-08-28 |
| 4429845 |
Rail track heaters |
Paul J. Borkoski |
1984-02-07 |
| D263734 |
Metal extrusion for an electric heating element |
Donald M. Cunningham, Richard W. Brent |
1982-04-06 |
| D256724 |
Heat exchanger grid for an electric heater |
Alben C. Boggs |
1980-09-02 |