Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6621581 | Method and apparatus for mapping surface topography of a substrate | James D. Hunt, Charles A. Monjak | 2003-09-16 |
| 6509965 | Wafer inspection system for distinguishing pits and particles | Michael E. Fossey, John C. Stover | 2003-01-21 |
| 6122047 | Methods and apparatus for identifying the material of a particle occurring on the surface of a substrate | John C. Stover, Songping Gao, Michael E. Fossey | 2000-09-19 |
| 6118525 | Wafer inspection system for distinguishing pits and particles | Michael E. Fossey, John C. Stover | 2000-09-12 |
| 5712701 | Surface inspection system and method of inspecting surface of workpiece | Michael E. Fossey | 1998-01-27 |
| 5329351 | Particle detection system with coincident detection | — | 1994-07-12 |