Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9804087 | Hemispherical scanning optical scatterometer | Eric Hegstrom | 2017-10-31 |
| 9030657 | Device and method for subaperture stray light detection and diagnosis | William P. Kuhn, Robert S. LeCompte | 2015-05-12 |
| 7007386 | Light duty bearing assembly | — | 2006-03-07 |
| 6833028 | Particle deposition system with enhanced speed and diameter accuracy | Craig A. Scheer | 2004-12-21 |
| 6760100 | Method and apparatus for classifying defects occurring at or near a surface of a smooth substrate | Vladimir Ivakhnenko | 2004-07-06 |
| 6509965 | Wafer inspection system for distinguishing pits and particles | Michael E. Fossey, Lee D. Clementi | 2003-01-21 |
| 6486946 | Method for discriminating between holes in and particles on a film covering a substrate | Yuri A. Eremin | 2002-11-26 |
| 6292259 | Wafer inspection system for distinguishing pits and particles | Michael E. Fossey | 2001-09-18 |
| 6169601 | Method and apparatus for distinguishing particles from subsurface defects on a substrate using polarized light | Yuri A. Eremin, Craig A. Scheer | 2001-01-02 |
| 6122047 | Methods and apparatus for identifying the material of a particle occurring on the surface of a substrate | Songping Gao, Michael E. Fossey, Lee D. Clementi | 2000-09-19 |
| 6118525 | Wafer inspection system for distinguishing pits and particles | Michael E. Fossey, Lee D. Clementi | 2000-09-12 |
| 6091493 | Process for particle size measurement | Craig A. Scheer | 2000-07-18 |
| 5955654 | Calibration standard for microroughness measuring instruments | Bradley W. Scheer | 1999-09-21 |
| 5416590 | Apparatus and process for measuring gap and mismatch | Donald R. Bjork, Donald A. Rudberg, Mark E. Southwood, Brett D. Swimley | 1995-05-16 |
| 5406082 | Surface inspection and characterization system and process | Lee H. Pearson, Mary Knighton, Brett D. Swimley | 1995-04-11 |
| 5196906 | Modular scatterometer with interchangeable scanning heads | James A. Bender, Marvin L. Bernt, Donald R. Bjork, Paul D. Chausse, Daniel R. Cheever +3 more | 1993-03-23 |
| 4468556 | Electric heating elements | Donald M. Cunningham | 1984-08-28 |
| 4429845 | Rail track heaters | Paul J. Borkoski | 1984-02-07 |
| D263734 | Metal extrusion for an electric heating element | Donald M. Cunningham, Richard W. Brent | 1982-04-06 |
| D256724 | Heat exchanger grid for an electric heater | Alben C. Boggs | 1980-09-02 |