| 11302511 |
Field curvature correction for multi-beam inspection systems |
Alan D. Brodie, Rainer Knippelmeyer, Christopher Sears, Grace Hsiu-Ling Chen |
2022-04-12 |
| 6717141 |
Reduction of aberrations produced by Wien filter in a scanning electron microscope and the like |
Ira Rosenberg, Neal T. Sullivan |
2004-04-06 |
| 6620565 |
Electron beam lithography apparatus focused through spherical aberration introduction |
Victor Katsap, Eric Munro, Warren K. Waskiewicz, Xieqing Zhu |
2003-09-16 |
| 6440620 |
Electron beam lithography focusing through spherical aberration introduction |
Victor Katsap, Eric Munro, Warren K. Waskiewicz, Xieqing Zhu |
2002-08-27 |
| 6441378 |
Magnetic energy filter |
Katsushige Tsuno, Eric Munro |
2002-08-27 |
| 6420714 |
Electron beam imaging apparatus |
Victor Katsap, Eric Munro, Warren K. Waskiewicz, Xieqing Zhu |
2002-07-16 |
| 4699108 |
Fuel injection pumping apparatus |
Dorian F. Mowbray |
1987-10-13 |
| 4390188 |
High pressure hydraulic systems |
— |
1983-06-28 |
