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Toxic outgas control post process |
— |
2024-02-13 |
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Method for decreasing cool down time with heated system for semiconductor manufacturing equipment |
Joseph Ferrara |
2023-08-15 |
| 11114330 |
Substrate support having customizable and replaceable features for enhanced backside contamination performance |
Dave Shaner |
2021-09-07 |
| 11011397 |
Wafer soak temperature readback and control via thermocouple embedded end effector for semiconductor processing equipment |
— |
2021-05-18 |
| 10903097 |
In-situ wafer temperature measurement and control |
Ronald N. Reece, Petros Miltiades Kopalidis |
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Radiant heating presoak |
Billy Benoit |
2020-12-08 |
| 10794694 |
Shallow angle, multi-wavelength, multi-receiver, adjustable sensitivity aligner sensor for semiconductor manufacturing equipment |
Billy Benoit, Joe Ferrara, Brian Terry |
2020-10-06 |
| 10714317 |
Reduction of condensed gases on chamber walls via heated chamber housing for semiconductor processing equipment |
— |
2020-07-14 |
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Low conductance self-shielding insulator for ion implantation systems |
Neil K. Colvin |
2020-06-09 |
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Outgassing impact on process chamber reduction via chamber pump and purge |
— |
2019-03-12 |
| 10128084 |
Wafer temperature control with consideration to beam power input |
Joe Ferrara, Brian Terry |
2018-11-13 |
| 10074508 |
Low conductance self-shielding insulator for ion implantation systems |
Neil K. Colvin |
2018-09-11 |
| 10041789 |
Integrated emissivity sensor alignment characterization |
Joseph Ferrara |
2018-08-07 |
| 9502207 |
Cam actuated filament clamp |
Jason R. Beringer |
2016-11-22 |