Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10794694 | Shallow angle, multi-wavelength, multi-receiver, adjustable sensitivity aligner sensor for semiconductor manufacturing equipment | John F. Baggett, Billy Benoit, Brian Terry | 2020-10-06 |
| 10128084 | Wafer temperature control with consideration to beam power input | John F. Baggett, Brian Terry | 2018-11-13 |