DS

Dave Shaner

AT Axcelis Technologies: 1 patents #165 of 300Top 60%
Overall (All Time): #2,748,369 of 4,157,543Top 70%
1
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
11114330 Substrate support having customizable and replaceable features for enhanced backside contamination performance John F. Baggett 2021-09-07