| 10020187 |
Apparatus and methods for backside passivation |
Lara Hawrylchak |
2018-07-10 |
| 7790633 |
Sequential deposition/anneal film densification method |
Raihan M. Tarafdar, George D. Papasouliotis, Ron Rulkens, Dennis M. Hausmann, Adrianne K. Tipton +1 more |
2010-09-07 |
| 7482247 |
Conformal nanolaminate dielectric deposition and etch bag gap fill process |
George D. Papasouliotis, Raihan M. Tarafdar, Ron Rulkins, Dennis M. Hausmann, Adrianne K. Tipton +5 more |
2009-01-27 |
| 7297608 |
Method for controlling properties of conformal silica nanolaminates formed by rapid vapor deposition |
George D. Papasouliotis, Raihan M. Tarafdar, Ron Rulkens, Dennis M. Hausmann, Adrianne K. Tipton +1 more |
2007-11-20 |
| 7294583 |
Methods for the use of alkoxysilanol precursors for vapor deposition of SiO2 films |
Ron Rulkens, George D. Papasouliotis, Dennis M. Hausmann, Raihan M. Tarafdar, Bunsen B. Nie +1 more |
2007-11-13 |
| 7271112 |
Methods for forming high density, conformal, silica nanolaminate films via pulsed deposition layer in structures of confined geometry |
George D. Papasouliotis, Raihan M. Tarafdar, Adrianne K. Tipton, Ron Rulkens, Dennis M. Hausmann |
2007-09-18 |
| 7223707 |
Dynamic rapid vapor deposition process for conformal silica laminates |
George D. Papasouliotis, Ron Rulkens, Dennis M. Hausmann, Adrianne K. Tipton, Raihan M. Tarafdar +1 more |
2007-05-29 |
| 7202185 |
Silica thin films produced by rapid surface catalyzed vapor deposition (RVD) using a nucleation layer |
Dennis M. Hausmann, George D. Papasouliotis, Ron Rulkens, Raihan M. Tarafdar, Adrianne K. Tipton +1 more |
2007-04-10 |
| 7148155 |
Sequential deposition/anneal film densification method |
Raihan M. Tarafdar, George D. Papasouliotis, Ron Rulkens, Dennis M. Hausmann, Adrianne K. Tipton +1 more |
2006-12-12 |
| 7097878 |
Mixed alkoxy precursors and methods of their use for rapid vapor deposition of SiO2 films |
Ron Rulkens, Dennis M. Hausmann, Raihan M. Tarafdar, George D. Papasouliotis, Bunsen B. Nie +1 more |
2006-08-29 |
| 6314885 |
Imposition proofing |
Robert Bullock |
2001-11-13 |
| 6299160 |
Imposition proofing |
Robert Bullock |
2001-10-09 |
