Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12087601 | Reducing line edge roughness and mitigating defects by wafer freezing | Karen E. Petrillo, Yongan Xu | 2024-09-10 |
| 11171051 | Contacts and liners having multi-segmented protective caps | Su Chen Fan, Christopher J. Waskiewicz, Muthumanickam Sankarapandian | 2021-11-09 |