Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7825389 | Method and apparatus for controlling a gas cluster ion beam formed from a gas mixture | John Hautala, Matthew C. Gwinn | 2010-11-02 |
| 6770874 | Gas cluster ion beam size diagnostics and workpiece processing | — | 2004-08-03 |
| 6737643 | Detector and method for cluster ion beam diagnostics | Richard Torti, Matthew C. Gwinn | 2004-05-18 |
| 6635883 | Gas cluster ion beam low mass ion filter | Richard Torti | 2003-10-21 |
| 6629508 | Ionizer for gas cluster ion beam formation | — | 2003-10-07 |
| 6624081 | Enhanced etching/smoothing of dielectric surfaces | David Mount, Wesley Skinner, Allen R. Kirkpatrick | 2003-09-23 |
| 6331227 | Enhanced etching/smoothing of dielectric surfaces | David Mount, Wesley Skinner, Allen R. Kirkpatrick | 2001-12-18 |
| 5177366 | Ion beam implanter for providing cross plane focusing | Monroe L. King | 1993-01-05 |
| 5091655 | Reduced path ion beam implanter | Andrew M. Ray, Monroe L. King | 1992-02-25 |
| 4943728 | Beam pattern control system for an ion implanter | Andrew M. Ray | 1990-07-24 |
| 4929840 | Wafer rotation control for an ion implanter | Andrew M. Ray | 1990-05-29 |
| 4700077 | Ion beam implanter control system | Andrew M. Ray, Monroe L. King | 1987-10-13 |
| 4514637 | Atomic mass measurement system | Brad L. Bellamy | 1985-04-30 |