Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9932670 | Method of decontamination of process chamber after in-situ chamber clean | Jie Su, Lori D. Washington, Sandeep Nijhawan, Olga Kryliouk, Sang Won Kang +2 more | 2018-04-03 |
| 9644267 | Multi-gas straight channel showerhead | Brian H. Burrows, Alexander Tam, Ronald Stevens, Kenric Choi, James D. Felsch +4 more | 2017-05-09 |
| 8481118 | Multi-gas straight channel showerhead | Brian H. Burrows, Alexander Tam, Ronald Stevens, Kenric Choi, James D. Felsch +4 more | 2013-07-09 |
| 7976631 | Multi-gas straight channel showerhead | Brian H. Burrows, Alexander Tam, Ronald Stevens, Kenric Choi, James D. Felsch +4 more | 2011-07-12 |