Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9119278 | System, method and apparatus for aligning and synchronizing target material for optimum extreme ultraviolet light output | Christopher C. Chrobak, William N. Partlo, Igor V. Fomenkov, Alexander I. Ershov | 2015-08-25 |
| 9000403 | System and method for adjusting seed laser pulse width to control EUV output energy | Matthew R. Graham, Robert Jay Rafac, Daniel Jason Riggs | 2015-04-07 |
| 8872122 | Method of timing laser beam pulses to regulate extreme ultraviolet light dosing | Alexander Anthony Schafgans, Matthew R. Graham, Steven Chang, Paul Frihauf, Andrew Liu +1 more | 2014-10-28 |
| 8872123 | Method of timing laser beam pulses to regulate extreme ultraviolet light dosing | Robert N. Jacques, Matthew R. Graham, Andrew Liu | 2014-10-28 |
| 8653491 | System, method and apparatus for aligning and synchronizing target material for optimum extreme ultraviolet light output | William N. Partlo, Igor V. Fomenkov, Alexander I. Ershov, Chris C. Chrobak | 2014-02-18 |