Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11875101 | Method for patterning process modelling | Jen-Shiang Wang, Feng Chen, Matteo Alessandro Francavilla | 2024-01-16 |
| 10296681 | Process based metrology target design | Guangqing Chen, Shufeng Bai, Eric Kent, Yen-Wen Lu, Paul Anthony Tuffy +3 more | 2019-05-21 |
| 10007744 | Process based metrology target design | Guangqing Chen, Shufeng Bai, Eric Kent, Yen-Wen Lu, Paul Anthony Tuffy +3 more | 2018-06-26 |