Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12372779 | Controlling light source wavelengths for selectable phase shifts between pixels in digital lithography systems | Thomas Laidig, Christopher Dennis Bencher, Uwe Hollerbach | 2025-07-29 |
| 12099308 | Methods and apparatus for correcting lithography systems | Qin Zhong | 2024-09-24 |
| 11899198 | Controlling light source wavelengths for selectable phase shifts between pixels in digital lithography systems | Thomas Laidig, Christopher Dennis Bencher, Uwe Hollerbach | 2024-02-13 |
| 10983441 | Resolution enhanced digital lithography with anti-blazed DMD | Thomas Laidig | 2021-04-20 |
| 10495983 | Piecewise alignment modeling method | Tamer Coskun | 2019-12-03 |
| 10451564 | Empirical detection of lens aberration for diffraction-limited optical system | Qin Zhong, Antoine P. Manens | 2019-10-22 |
| 10429744 | Image improvement for alignment through incoherent illumination blending | Tamer Coskun | 2019-10-01 |
| 10372042 | Resolution enhanced digital lithography with anti-blazed DMD | Thomas Laidig | 2019-08-06 |
| 10133193 | Piecewise alignment modeling method | Tamer Coskun | 2018-11-20 |
| 9052494 | Optical imaging system with catoptric objective; broadband objective with mirror; and refractive lenses and broadband optical imaging system having two or more imaging paths | Shiow-Hwei Hwang, Gregory L. Kirk, David Shafer, Russel Hudyma | 2015-06-09 |