Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11477877 | Laser apparatus for generating extreme ultraviolet light | Yasunori Wada, Tatsuya Yanagida, Osamu Wakabayashi | 2022-10-18 |
| 10764986 | Extreme ultraviolet light generation apparatus | Shinji Nagai, Tamotsu Abe, Osamu Wakabayashi | 2020-09-01 |
| 10512148 | System and method for generating extreme ultraviolet light employing laser pulse including pedestal | Yasunori Wada, Tatsuya Yanagida, Osamu Wakabayashi | 2019-12-17 |
| 10314152 | Extreme ultraviolet light generation apparatus | Shinji Nagai, Tamotsu Abe, Osamu Wakabayashi | 2019-06-04 |
| 9510433 | Extreme ultraviolet light generation apparatus | Shinji Nagai, Tamotsu Abe, Osamu Wakabayashi | 2016-11-29 |
| 8872142 | Extreme ultraviolet light generation apparatus | Shinji Nagai, Tamotsu Abe, Osamu Wakabayashi | 2014-10-28 |
| 8624208 | Extreme ultraviolet light generation system | Shinji Nagai, Tamotsu Abe, Osamu Wakabayashi | 2014-01-07 |
| 8604451 | Target supply apparatus | Takayuki Yabu, Masaki Nakano, Takanobu Ishihara | 2013-12-10 |