Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7466396 | Lithography apparatus and method utilizing pendulum interferometer system | Michael Binnard, Douglas C. Watson, W. Thomas Novak, Yoshifumi Nakakoji, Hideaki Sakamoto | 2008-12-16 |
| 7081946 | Holding apparatus, holding method, exposure apparatus and device manufacturing method | Tsuneyuki Hagiwara, Hiromitsu Yoshimoto, Hideo Mizutani | 2006-07-25 |
| 6721034 | Stage unit, drive table, and scanning exposure apparatus using the same | — | 2004-04-13 |
| 6262797 | Stage unit, drive table, and scanning exposure apparatus using the same | — | 2001-07-17 |
| 6211946 | Stage unit, drive table, and scanning exposure apparatus using the same | Toshiya Ohtomo | 2001-04-03 |
| 6124923 | Stage unit, drive table, and scanning exposure apparatus using the same | — | 2000-09-26 |
| 5991005 | Stage apparatus and exposure apparatus having the same | Yutaka Hayashi | 1999-11-23 |
| 5850280 | Stage unit, drive table, and scanning exposure and apparatus using same | Toshiya Ohtomo | 1998-12-15 |