Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9633846 | Internal plasma grid applications for semiconductor fabrication | Alex Paterson, Do-Young Kim, Gowri Kamarthy, Jen-Kan Yu, Monica Titus +5 more | 2017-04-25 |
| 9385003 | Residue free systems and methods for isotropically etching silicon in tight spaces | Ming-Shu KUO, Qinghua Zhong, Ganesh Upadhyaya, Gowri Kamarthy | 2016-07-05 |
| 9230819 | Internal plasma grid applications for semiconductor fabrication in context of ion-ion plasma processing | Alex Paterson, Do-Young Kim, Gowri Kamarthy, Jen-Kan Yu, Monica Titus +5 more | 2016-01-05 |
| 7682980 | Method to improve profile control and N/P loading in dual doped gate applications | Frank Y. Lin, Chris Lee, Vahid Vahedi, Thomas A. Kamp, Alan J. Miller +2 more | 2010-03-23 |