Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8188449 | Charged particle beam drawing method and apparatus | Hitoshi Higurashi, Akihito Anpo, Jun Yashima, Shigehiro Hara, Susumu Oogi | 2012-05-29 |
| 8076656 | Writing apparatus and writing data conversion method | — | 2011-12-13 |
| 7926007 | Writing apparatus, writing data conversion method, and computer-readable recording medium storing program using Huffman tree for converting writing data in lithographic process | — | 2011-04-12 |