HR

Hans J. Rutishauser

AT Axcelis Technologies: 3 patents #78 of 300Top 30%
Overall (All Time): #1,605,656 of 4,157,543Top 40%
3
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
6774378 Method of tuning electrostatic quadrupole electrodes of an ion beam implanter Yongzhang Huang, Xiangyang Wu 2004-08-10
6207964 Continuously variable aperture for high-energy ion implanter Edward K. McIntyre, Donald E. DeLuca, Gerald L. Dionne, Paul A. Loomis, Donald N. Polner +1 more 2001-03-27
6194734 Method and system for operating a variable aperture in an ion implanter Paul A. Loomis, Jun Lu, Michiro Sugitani, Toru Murakami, Hiroshi Sogabe 2001-02-27