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Vertical semiconductor device and method for fabricating the vertical semiconductor device |
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Method and apparatus for manufacturing three-dimensional-structure memory device |
Sung Kil CHO, Sang Ho Woo, Seung Woo Shin, Gil Sun Jang, Wan Suk Oh |
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Method for depositing insulating film on recessed portion having high aspect ratio |
Chang-Hun Shin, Seok-Yun Kim, Choon Sik Jeong |
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Cyclic deposition method for thin film and manufacturing method for semiconductor, and semiconductor device |
Seok-Yun Kim |
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Method and apparatus for depositing amorphous silicon film |
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Method and apparatus for manufacturing three-dimensional-structure memory device |
Sung Kil CHO, Sang Ho Woo, Seung Woo Shin, Gil Sun Jang, Wan Suk Oh |
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Method and apparatus for manufacturing three-dimensional-structure memory device |
Sung Kil CHO, Sang Ho Woo, Seung Woo Shin, Gil Sun Jang, Wan Suk Oh |
2016-07-19 |
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Cyclic deposition method for thin film formation, semiconductor manufacturing method, and semiconductor device |
Seok-Yun Kim, Chang-Hun Shin, Jeong Hoon Lee |
2016-04-12 |
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Production method for semiconductor device |
Sang Ho Woo, Sung Kil CHO, Gil Sun Jang |
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Method for depositing cyclic thin film |
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Method for manufacturing semiconductor device having recess gate |
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Capacitor with nanotubes and method for fabricating the same |
Eun A. Lee, Ho Jin Cho, Young-Dae Kim, Jun Soo Chang, Su Jin CHAE |
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Capacitor with nanotubes and method for fabricating the same |
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Capacitor in semiconductor device and method of manufacturing the same |
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Method for fabricating contact plug with low contact resistance |
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Capacitor fabrication method |
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