Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7497221 | Method for cleaning deposition chamber | — | 2009-03-03 |
| 7361229 | Device for deposition with chamber cleaner and method for cleaning chamber | — | 2008-04-22 |
| 6933228 | Method of manufacturing of contact plug in a contact hole on a silicon substrate | — | 2005-08-23 |
| 6923869 | Device for deposition with chamber cleaner and method for cleaning the chamber | — | 2005-08-02 |
| 6844259 | Method for forming contact plug in semiconductor device | — | 2005-01-18 |
| 6818537 | Method of manufacturing a contact plug for a semiconductor device | — | 2004-11-16 |
| 6712903 | Mask for evaluating selective epitaxial growth process | — | 2004-03-30 |
| 6624065 | Method of fabricating a semiconductor device using a damascene metal gate | Se-Aug Jang | 2003-09-23 |
| 6605520 | Method of forming silicon-germanium film | — | 2003-08-12 |
| 6521508 | Method of manufacturing a contact plug in a semiconductor device using selective epitaxial growth of silicon process | Eui Beom Roh | 2003-02-18 |
| 6478873 | Method of optimizing process of selective epitaxial growth | Hai Won Kim | 2002-11-12 |