Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12424412 | Apparatus for providing RF power and operating method thereof | Siyoung Koh, Namkyun Kim, Seungbo Shim, Sungyong Lim, Sungyeol Kim | 2025-09-23 |
| 11282679 | Plasma control apparatus and plasma processing system including the same | Donghyeon Na, Hyosin KIM, Seungbo Shim, Dougyong Sung, Minyoung Hur | 2022-03-22 |