Issued Patents All Time
Showing 1–25 of 48 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8911231 | Substrate treatment installation with adjustable thermal insulation for controlling substrate temperature | Hubertus Von Der Waydbrink, Thomas Meyer, Michael Hentschel, Reinhardt Bauer, Andrej Wolf | 2014-12-16 |
| 8828194 | Layer system that can be annealed and method for producing the same | Joerg Fiukowski, Matthias List, Falk Milde | 2014-09-09 |
| 8718456 | Surface heating device for a substrate treatment device and substrate treatment device | Michael Hentschel, Thomas Meyer, Hubertus Von Der Waybrink, Marco Kenne, Daniel Stange | 2014-05-06 |
| 8669463 | Method for depositing a transparent conductive oxide (TCO) film on a substrate and thin-film solar cell | Martin Dimer, Tina Schoessler, Thomas Knoth, Ralf STURM, Uwe GRAUPNER +1 more | 2014-03-11 |
| 8607624 | Sensor system for determining a parameter of a fluid medium | Erhard Renninger, Achim Briese, Ulrich Wagner, Uwe Konzelmann, Christoph Gmelin | 2013-12-17 |
| 8448503 | Hot-film air-mass meter having a flow separating element | Bernhard Opitz, Ulrich Wagner, Christoph Gmelin, Klaus Reymann | 2013-05-28 |
| 8448508 | Hot film air mass meter and method for its manufacture | Norbert Schneider, Uwe Konzelmann, Lutz Westenberger, Bernd Kuenzl | 2013-05-28 |
| 8367226 | Annealable layer system | Joerg Fiukowski, Matthias List, Falk Milde | 2013-02-05 |
| 8197222 | Getter pump and vacuum coating installation comprising a getter pump | Falk Milde, Joern Brueckner | 2012-06-12 |
| 8136549 | Sluice system for a vacuum facility | Olaf Gawer, Jens Melcher, Dietmar Schulze | 2012-03-20 |
| 8127712 | Vacuum coating system comprising a transport unit for transporting substrates | Reinhardt Bauer, Frank Hupka, Andreas Heisig, Johannes Struempfel, Wolfgang Erbkamm | 2012-03-06 |
| 8033781 | Method for loading and unloading a transport device | Johannes Struempfel, Reinhardt Bauer, Andrewas Heisig, Hartmut Freitag, Heiko Richter +2 more | 2011-10-11 |
| 8007223 | Transport device, loading device and method for loading and unloading the transport device | Johannes Struempfel, Reinhardt Bauer, Andreas Heisig, Hartmut Freitag, Heiko Richter +2 more | 2011-08-30 |
| 7607359 | Ultrasonic flow rate meter having a pressure sensor | Roland Mueller, Uwe Konzelmann, Tobias Lang, Sami Radwan | 2009-10-27 |
| 7279759 | Membrane sensor | Roland Muller-Fiedler, Joerg Muchow, Matthias Fuertsch, Andreas Stratmann, Heribert Weber +6 more | 2007-10-09 |
| 7096723 | Method and device for determining the throughput of a flowing medium | Dieter Tank, Manfred Strohrmann, Wolfgang Mueller, Axel-Werner Haag, Uwe Konzelmann +2 more | 2006-08-29 |
| 6964710 | Method for cleaning of a measuring element passed over by a gas flow | Torsten Schulz, Thomas Lenzing, Klaus Reymann, Uwe Konzelmann | 2005-11-15 |
| 6942768 | Vacuum coating apparatus | Wolfgang Erbkamm, Michael Hofmann, Falk Milde | 2005-09-13 |
| 6845660 | Sensor chip with additional heating element, method for preventing a sensor chip from being soiled, and use of an additional heating element on a sensor chip | Uwe Konzelmann, Torsten Schulz | 2005-01-25 |
| 6820479 | Device for determining at least one parameter of a flowing medium | Herbert Roeckel, Erhard Renninger, Gerhard Hueftle, Manfred Strohrmann, Rainer Schard +1 more | 2004-11-23 |
| 6820482 | Method and device for determining gas flow | Manfred Lembke, Uwe Konzelmann | 2004-11-23 |
| 6647775 | Device for measuring at least one parameter of a flowing medium | Gerhard Hueftle, Thomas Lenzing, Manfred Strohrmann, Wolfgang Mueller, Dieter Tank +5 more | 2003-11-18 |
| 6591675 | Device for measuring the mass of a flowing medium | Klaus Doderer, Gerhard Hueftle, Manfred Strohrmann, Rainer Schard, Uwe Konzelmann | 2003-07-15 |
| 6332356 | Measuring device for measuring the mass of a medium flowing in a line | Wolfgang Mueller | 2001-12-25 |
| 6318170 | Measurement device for measuring the mass of a flowing medium | Erhard Renninger, Gerhard Hueftle, Uwe Konzelmann, Matthias Kallabis, Andreas Stark +2 more | 2001-11-20 |