Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11618950 | Coating processes for vacuum chamber arrangements and apparatus thereof | Lutz Gottsmann, Georg Laimer | 2023-04-04 |
| 10770324 | Substrate holding device, substrate transport device, processing arrangement and method for processing a substrate | Robert Kuenanz, Georg Laimer, Erwin Zschieschang, Bjoern Hornbostel, Christoph Haeusler | 2020-09-08 |
| 8136549 | Sluice system for a vacuum facility | Olaf Gawer, Dietmar Schulze, Hans Hecht | 2012-03-20 |
| 7776192 | Elongate vacuum system for coating one or both sides of a flat substrate | Wolfgang Erbkamm, Dietmar Schulze, Olaf Gawer | 2010-08-17 |