Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10770324 | Substrate holding device, substrate transport device, processing arrangement and method for processing a substrate | Robert Kuenanz, Jens Melcher, Georg Laimer, Bjoern Hornbostel, Christoph Haeusler | 2020-09-08 |
| 9076635 | Substrate treatment installation | Harald Gross | 2015-07-07 |