Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8980072 | Method and arrangement for redundant anode sputtering having a dual anode arrangement | Goetz Teschner, Enno Mirring, Johannes Struempfel | 2015-03-17 |
| 8257500 | Transport apparatus for elongate substrates | Johannes Struempfel, Reinhardt Bauer, Andre Ulbricht, Steffen Goerke, Heiko Richter +1 more | 2012-09-04 |
| 8127712 | Vacuum coating system comprising a transport unit for transporting substrates | Reinhardt Bauer, Frank Hupka, Johannes Struempfel, Hans Hecht, Wolfgang Erbkamm | 2012-03-06 |
| 8069974 | Transport device with a monitoring appliance and substrate treatment apparatus | Reinhardt Bauer, Johannes Struempfel, Matthias Smolke, Thomas Posseckardt, Frank Hupka | 2011-12-06 |
| 8070356 | Method for the temperature measurement of substrates, and vacuum processing apparatus | Thomas Meyer | 2011-12-06 |
| 8007223 | Transport device, loading device and method for loading and unloading the transport device | Johannes Struempfel, Reinhardt Bauer, Hans Hecht, Hartmut Freitag, Heiko Richter +2 more | 2011-08-30 |