Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9117637 | Redundant anode sputtering method and assembly | Falk Milde, Enno Mirring, Frank Meissner, Goetz Grosser | 2015-08-25 |
| 8980072 | Method and arrangement for redundant anode sputtering having a dual anode arrangement | Enno Mirring, Johannes Struempfel, Andreas Heisig | 2015-03-17 |
| 8828199 | Supporting device for a magnetron assembly with a rotatable target | Hans-Jürgen Heinrich, Harald GRUNE, Sven Haehne | 2014-09-09 |
| 8337681 | Endblock for a magnetron device with a rotatable target | Hans-Juergen Heinrich, Ulf Seyfert | 2012-12-25 |
| 7938943 | Supply end block for rotary magnetron | Hans-Juergen Heinrich, Thorsten Sander, Cornell Weidelt, Joern Brueckner | 2011-05-10 |
| 5415757 | Apparatus for coating a substrate with electrically nonconductive coatings | Joachim Szcyrbowski, Guenter Braeuer | 1995-05-16 |
| 5286360 | Apparatus for coating a substrate, especially with electrically nonconductive coatings | Joachim Szczyrbowski, Siegfried Beisswenger | 1994-02-15 |