Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8828199 | Supporting device for a magnetron assembly with a rotatable target | Goetz Teschner, Hans-Jürgen Heinrich, Harald GRUNE | 2014-09-09 |
| 8506773 | Drive end-block for a rotatable magnetron | Hans-Juergen Heinrich | 2013-08-13 |
| 8192598 | End-block for a magnetron device with a rotatable target, and vacuum coating apparatus | Hans-Juergen Heinrich, Goetz Grosser, Ulf Seyfert | 2012-06-05 |