Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8827275 | Sealing device for rotary feedthrough | Hans-Juergen Heinrich, Peter Botzler | 2014-09-09 |
| 8337681 | Endblock for a magnetron device with a rotatable target | Hans-Juergen Heinrich, Goetz Teschner | 2012-12-25 |
| 8192598 | End-block for a magnetron device with a rotatable target, and vacuum coating apparatus | Hans-Juergen Heinrich, Goetz Grosser, Sven Haehne | 2012-06-05 |
| 5955829 | Cathode for electron gun with band-shaped beams | Olaf Roder, Siegfried Schiller, Siegfried Panzer, Robert Mohs | 1999-09-21 |
| 5561342 | Electron beam exit window | Olaf Roeder, Siegfried Panzer | 1996-10-01 |