Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9058961 | Rotatable sputter target comprising an end-block with a liquid coolant supply system | Thorsten Sander, Hans-Juergen Heinrich | 2015-06-16 |
| 7938943 | Supply end block for rotary magnetron | Hans-Juergen Heinrich, Goetz Teschner, Thorsten Sander, Joern Brueckner | 2011-05-10 |