Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8718456 | Surface heating device for a substrate treatment device and substrate treatment device | Michael Hentschel, Thomas Meyer, Hubertus Von Der Waybrink, Daniel Stange, Hans Hecht | 2014-05-06 |
| 8605292 | Method and device for cleaning an optical position measurement system for substrates in a coating installation | Damir Muchamedjarow, Hubertus Von Der Waydbrink, Michael Hentschel, Reinhardt Bauer, Steffen Leβmann +2 more | 2013-12-10 |