Issued Patents All Time
Showing 25 most recent of 35 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8895226 | Coating composition for DUV filtering, method of forming photoresist pattern using the same and method of fabricating semiconductor device by using the method | Hyun-Woo Kim, Hai-sub Na, Chil-Hee Chung | 2014-11-25 |
| 8715911 | Coating composition for DUV filtering, method of forming photoresist pattern using the same and method of fabricating semiconductor device by using the method | Hyun-Woo Kim, Hai-sub Na, Chil-Hee Chung | 2014-05-06 |
| 8551759 | Oligomer probe array and method of producing the same | Jung-hwan Hah, Sung-min Chi, Kyoung-seon Kim, Won-sun Kim, Sang-jun Choi +1 more | 2013-10-08 |
| 8278221 | Method of forming a hard mask and method of forming a fine pattern of semiconductor device using the same | Cha-Won Koh, Jeong-Lim Nam, Gi-Sung Yeo, Joon-soo Park, Ji-Young Lee | 2012-10-02 |
| 8026044 | Method of forming fine patterns of semiconductor device | Doo-Youl Lee, Suk-Joo Lee, Gi-Sung Yeo, Pan-Suk Kwak, Min Jong Hong | 2011-09-27 |
| 8013374 | Semiconductor memory devices including offset bit lines | Doo-Hoon Goo, Joo-tae Moon, Sang-Gyun Woo, Gi-Sung Yeo, Kyoung-Yun Baek | 2011-09-06 |
| 8013375 | Semiconductor memory devices including diagonal bit lines | Duo-Hoon Goo, Joo-Tac Moon, Sang-Gyun Woo, Gi-Sung Yeo, Kyoung-Yun Baek | 2011-09-06 |
| 8003543 | Method of forming a hard mask and method of forming a fine pattern of semiconductor device using the same | Cha-Won Koh, Jeong-Lim Nam, Gi-Sung Yeo, Joon-soo Park, Ji-Young Lee | 2011-08-23 |
| 7940373 | Compensating masks, multi-optical systems using the masks, and methods of compensating for 3-D mask effect using the same | Sung-soo Suh, Suk-Joo Lee, Yong-jin Chun, Sung Woo Lee, Young-Chang Kim | 2011-05-10 |
| 7900170 | System and method correcting optical proximity effect using pattern configuration dependent OPC models | Sung-soo Suh, Young-Seog Kang, Sang-Gyun Woo | 2011-03-01 |
| 7873935 | Method of manufacturing a mask | Sung-Gon Jung, Ji-Young Lee, Gi-Sung Yeo | 2011-01-18 |
| 7842450 | Method of forming a semiconductor device | Doo-Youl Lee, Suk-Joo Lee, Yool Kang, Chang-Jin Kang, Jae-ok Yoo +1 more | 2010-11-30 |
| 7807318 | Reflective photomask and method of fabricating the same | Jin Hong Park, Seong-sue Kim, Sang-Gyun Woo, Suk-Joo Lee | 2010-10-05 |
| 7799490 | Optical masks and methods for measuring aberration of a beam | Chan Hwang, Suk-Joo Lee, Sang-Gyun Woo | 2010-09-21 |
| 7795099 | Semiconductor devices having Fin-type active areas and methods of manufacturing the same | Hyun Jae Kang, Ji-Young Lee, Gi-Sung Yeo | 2010-09-14 |
| 7787301 | Flash memory device using double patterning technology and method of manufacturing the same | Doo-Youl Lee, Suk-Joo Lee, Gi-Sung Yeo, Cha-Won Koh, Pan-Suk Kwak | 2010-08-31 |
| 7732341 | Method of forming a hard mask and method of forming a fine pattern of semiconductor device using the same | Cha-Won Koh, Jeong-Lim Nam, Gi-Sung Yeo, Joon-soo Park, Ji-Young Lee | 2010-06-08 |
| 7670725 | Optical masks and methods for measuring aberration of a beam | Chan Hwang, Suk-Joo Lee, Sang-Gyun Woo | 2010-03-02 |
| 7670761 | Method of forming a fine pattern of a semiconductor device using a resist reflow measurement key | Doo-Youl Lee, Gi-Sung Yeo, Jung-hyeon Lee | 2010-03-02 |
| 7604917 | Polymer, top coating layer, top coating composition and immersion lithography process using the same | Sang-jun Choi | 2009-10-20 |
| 7604918 | Photosensitive polymer and photoresist composition having the same | Sang-jun Choi | 2009-10-20 |
| 7550383 | Methods of performing a photolithography process for forming asymmetric patterns and methods of forming a semiconductor device using the same | Joon-soo Park, Gi-Sung Yeo, Sang-Gyun Woo, Tae-Young Kim, Byeong-Soo Kim | 2009-06-23 |
| 7547936 | Semiconductor memory devices including offset active regions | Doo-Hoon Goo, Joo-tae Moon, Sang-Gyun Woo, Gi-Sung Yeo, Kyoung-Yun Baek | 2009-06-16 |
| 7539970 | Method of manufacturing mask | Sung-Gon Jung, Gi-Sung Yeo, Young Mi Lee | 2009-05-26 |
| 7452825 | Method of forming a mask structure and method of forming a minute pattern using the same | Doo-Youl Lee, Suk-Joo Lee, Gi-Sung Yeo, Cha-Won Koh, Sung-Gon Jung | 2008-11-18 |