Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8304173 | Photomasks, methods of exposing a substrate to light, methods of forming a pattern, and methods of manufacturing a semiconductor device | Sang-Yong Yu, Sung-Hyuck Kim | 2012-11-06 |
| 7897299 | Phase-shift mask and method of forming the same | Hee-Bom Kim, Sun Young Choi | 2011-03-01 |
| 7632611 | Method of manufacturing rim type of photomask and photomask made by such method | Chang Hwan Kim, Sun Young Choi, Chan-uk Jeon | 2009-12-15 |
| 7595136 | Method of fabricating chrome-less phase shift mask | In-Kyun Shin, Sung-Hyuck Kim | 2009-09-29 |
| 7432022 | Photo mask capable of improving resolution by utilizing polarization of light and method of manufacturing the same | Sung-Hyuck Kim, In-Kyun Shin | 2008-10-07 |