Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12394608 | Cleaning system for removing deposits from pump in an exhaust of a substrate processing system | Krishna Birru, Gang Liu, Leonard Wai Fung Kho, Anand Chandrashekar | 2025-08-19 |
| 8309473 | Method for purifying acetylene gas for use in semiconductor processes | Charles Merrill, Scott Stoddard | 2012-11-13 |
| 7955990 | Method for improved thickness repeatability of PECVD deposited carbon films | Jon Henri, Robert Sculac, Scott Stoddard | 2011-06-07 |
| 7820556 | Method for purifying acetylene gas for use in semiconductor processes | Charles Merrill, Scott Stoddard | 2010-10-26 |