Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6702302 | Edge handling wafer chuck | Rodney G Smedt | 2004-03-09 |
| 6217034 | Edge handling wafer chuck | Rodney G Smedt | 2001-04-17 |
| 5738767 | Substrate handling and processing system for flat panel displays | Eric C. Lawson, John L. Hughes | 1998-04-14 |
| 5379984 | Gate valve for vacuum processing system | George Matthias | 1995-01-10 |
| 5337818 | Rollaway extendable planar fabric closure | — | 1994-08-16 |
| 5212580 | Low cost stage for raster scanning of semiconductor wafers | James B. Stolz, Yung-Chao Lee, Ron B. Whitney, Peter G. Borden, Mark Nokes | 1993-05-18 |
| 4705951 | Wafer processing system | Frederick P. Layman, David Huntley, Paul H. Dick, Michael Kuhlman, Roger M. Vecta +1 more | 1987-11-10 |
| 4647266 | Wafer coating system | Martin A. Hutchinson, R. Howard Shaw | 1987-03-03 |
| 4589380 | Cyclic dwell engine | — | 1986-05-20 |
| 4548699 | Transfer plate rotation system | Martin A. Hutchinson, R. Howard Shaw | 1985-10-22 |
| 4491095 | Cyclic dwell engine | — | 1985-01-01 |
| 4311427 | Wafer transfer system | R. Howard Shaw, Martin A. Hutchinson | 1982-01-19 |
| 4233519 | Radiation therapy apparatus having retractable beam stopper | — | 1980-11-11 |