Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7038771 | Backside contamination inspection device | — | 2006-05-02 |
| 6702302 | Edge handling wafer chuck | George L. Coad | 2004-03-09 |
| 6559938 | Backside contamination inspection device | — | 2003-05-06 |
| 6217034 | Edge handling wafer chuck | George L. Coad | 2001-04-17 |
| 6204917 | Backside contamination inspection device | — | 2001-03-20 |
| 5043589 | Semiconductor device inspection apparatus using a plurality of reflective elements | Ian P. Raphael | 1991-08-27 |